Cryogenic two-photon laser photolithography with SU-8
نویسندگان
چکیده
منابع مشابه
8 SU - 8 Photolithography and Its Impact on Microfluidics
Microfluidics is the science and technology of systems that process or manipulate small amounts (microto picoliters) of fluids, using channels with dimensions of tens to hundreds of micrometers (Whitesides, 2006). Microfluidics offers several advantages in a variety of fields including fuel cells (Dyer, 2002; Jankowski et al., 2002; Erdler et al., 2006; Nguyen et al., 2006; Morse, 2007; Kuriyam...
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www.sciencemag.org (this information is current as of June 8, 2009 ): The following resources related to this article are available online at http://www.sciencemag.org/cgi/content/full/324/5929/913 version of this article at: including high-resolution figures, can be found in the online Updated information and services, http://www.sciencemag.org/cgi/content/full/1167610/DC1 can be found at: Sup...
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Controlling and reducing the developed region initiated by photoexposure is one of the fundamental goals of optical lithography. Here, we demonstrate a two-color irradiation scheme whereby initiating species are generated by single-photon absorption at one wavelength while inhibiting species are generated by single-photon absorption at a second, independent wavelength. Co-irradiation at the sec...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2006
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.2194311